説明
The system consists of two Versys Kiyo45 units and a handler 2300 v2 with three loadlock ports. The system was installed but never put into operation. It is currently being disassembled.構成
The standard configuration for the 2300 Etch Platform Three Load Port Module consists of: • VTM chamber • VTM frame • VTM left and right airlocks • VTM slot valves for transport module • VTM facilities for helium, nitrogen, and CDA • VTM robot • Atmospheric Transfer Module (ATM) wafer aligner • VTM wafer sensors 200/300-mm • ATM minienvironment • VTM vacuum, purge, and vent systems, including point-of-use vacuum pump • ATM frame • ATM robot • ATM/loadlock slot valve • ATM power distribution • Power/control distribution rack that contains alternating current (AC) and direct current (DC) assembly racks, EthernetTM hub, switch box, user interface (UI) and system computer, uninterruptible power supply (UPS), ATM robot controlled assembly, and distribution panel. • Four-lens light towers • 2300 system software operating on Windows® NT® • 200-mm manual loader • Single user interface and display kit for the power/control rack • End-effectors for 200/300-mm wafers The standard configuration for the Versys® Kiyo45™ process module (PM), includes: • Wafer type: Semiconductor Equipment and Materials International • (SEMI) notch • Poly process kit that includes monopolar electrostatic chuck (ESC), quartz focus ring, gas feed, and Transformer Coupled Plasma™ (TCP®) coil • TCP 1.5 kW kit • Bias 1.5 kW kit • Fixed gap electrode • Bipolar ESC • Three pin wafer lift mechanism • Chemraz™ chamber O-rings • Heated foreline • Optical emissions spectroscopy • Alcatel® 2300 liter per second (l/s) with VAT™ DN 200 valve • Chamber gas feed with 10 roughness average (Ra) gas line surface finish • 200 mm courtesy kits • Interconnect cables: PM peripheral kit, 30 foot (gas box, TCU, mechanical pump, emergency off (EMO), LonWorks®) Following parts are included: - 2300 Versys Kiyo45 PM, 200 mm, R23K45-2501(F206130-PM2) - 2300 Versys Kiyo45 PM, 200 mm, R23K45-2502(F206130-PM3) - 2300 Etch 4VPM (Platform) - 2300 Process Modul - 2300 Versys Kiyo45 Options - Sym. Liner Door (improved) - 2300 LSR Endpoint Option: 2 PM - Barrier Seal Door on VAT Rocker - STD Service Covers for non e5 or non e6 - 2800 L/s Alcatel - N310279 FB PM SHW PCBA CPU X10 - N310268 FB PM SHW BIASPULSEKITK45 - Versys Kiyo45 Quick Clean kit - Versys Kiyo45 Pend. Valve kit - 2300 Gas Box - 2300 Versys Kiyo45 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Heated Gas Line - Facility Interface Box (System) - Facility Interface Box (Per Line) - Future PM Containment - IGS/JTS Tool Kit - MFC Ergo Toll Kit - Service Ladder - Gas Box Hoist - Refurb, UPPER FR, JTS GB, VE, V2, ICHOR SING - 2300 Platform - 3 Open Cassette - WIDS Btm Read - 25 Slot Aux Buffer Station - Conditioning Station (4 Wafer) - User Interface: Side and Front Monitor U - Cable: TM Subpanel, 100ft - Sys Calibration and Alignment - Service Step for PM - Robot CDM - Rocker Valve Actuator Hoist - Rocker Vat Valve Service Kit - N309780 FB PF SHW RF Dummy Load - Assy 2300 Platform V2,V3,V4-UCAP SEA - 2300 PeripheralsOEMモデルの説明
The 2300 Versys Kiyo45 is a Reactive Ion Etch (RIE) system from Lam Research, part of the Kiyo Product Family. It is used to shape the electrically active materials of a semiconductor device with high precision and consistency. The Kiyo product family is known for its high-performance capabilities and productivity. The Versys Kiyo45 is used for various applications, including shallow trench isolation, source/drain engineering, high-k/metal gate, FinFET and tri-gate, and multi-patterning. It enables processing at sub-65 nm technology nodes.ドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 5日前
主なアイテムの詳細
状態：
New
稼働ステータス:
Deinstalled / Uncrated
製品ID：
145036
ウェーハサイズ：
8"/200mm
HDD / Software:
Yes
Gas Lines:
SiCl4, BCl3, O2, Cl2, NF3, HBr, SF6, N2, CF4, Ar, He, CH2F2, H2, CH4
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH CORPORATION
2300 VERSYS KIYO45
カテゴリ
Dry / Plasma Etch
最終検証： 5日前
主なアイテムの詳細
状態：
New
稼働ステータス:
Deinstalled / Uncrated
製品ID：
145036
ウェーハサイズ：
8"/200mm
HDD / Software:
Yes
Gas Lines:
SiCl4, BCl3, O2, Cl2, NF3, HBr, SF6, N2, CF4, Ar, He, CH2F2, H2, CH4
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
The system consists of two Versys Kiyo45 units and a handler 2300 v2 with three loadlock ports. The system was installed but never put into operation. It is currently being disassembled.構成
The standard configuration for the 2300 Etch Platform Three Load Port Module consists of: • VTM chamber • VTM frame • VTM left and right airlocks • VTM slot valves for transport module • VTM facilities for helium, nitrogen, and CDA • VTM robot • Atmospheric Transfer Module (ATM) wafer aligner • VTM wafer sensors 200/300-mm • ATM minienvironment • VTM vacuum, purge, and vent systems, including point-of-use vacuum pump • ATM frame • ATM robot • ATM/loadlock slot valve • ATM power distribution • Power/control distribution rack that contains alternating current (AC) and direct current (DC) assembly racks, EthernetTM hub, switch box, user interface (UI) and system computer, uninterruptible power supply (UPS), ATM robot controlled assembly, and distribution panel. • Four-lens light towers • 2300 system software operating on Windows® NT® • 200-mm manual loader • Single user interface and display kit for the power/control rack • End-effectors for 200/300-mm wafers The standard configuration for the Versys® Kiyo45™ process module (PM), includes: • Wafer type: Semiconductor Equipment and Materials International • (SEMI) notch • Poly process kit that includes monopolar electrostatic chuck (ESC), quartz focus ring, gas feed, and Transformer Coupled Plasma™ (TCP®) coil • TCP 1.5 kW kit • Bias 1.5 kW kit • Fixed gap electrode • Bipolar ESC • Three pin wafer lift mechanism • Chemraz™ chamber O-rings • Heated foreline • Optical emissions spectroscopy • Alcatel® 2300 liter per second (l/s) with VAT™ DN 200 valve • Chamber gas feed with 10 roughness average (Ra) gas line surface finish • 200 mm courtesy kits • Interconnect cables: PM peripheral kit, 30 foot (gas box, TCU, mechanical pump, emergency off (EMO), LonWorks®) Following parts are included: - 2300 Versys Kiyo45 PM, 200 mm, R23K45-2501(F206130-PM2) - 2300 Versys Kiyo45 PM, 200 mm, R23K45-2502(F206130-PM3) - 2300 Etch 4VPM (Platform) - 2300 Process Modul - 2300 Versys Kiyo45 Options - Sym. Liner Door (improved) - 2300 LSR Endpoint Option: 2 PM - Barrier Seal Door on VAT Rocker - STD Service Covers for non e5 or non e6 - 2800 L/s Alcatel - N310279 FB PM SHW PCBA CPU X10 - N310268 FB PM SHW BIASPULSEKITK45 - Versys Kiyo45 Quick Clean kit - Versys Kiyo45 Pend. Valve kit - 2300 Gas Box - 2300 Versys Kiyo45 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Heated Gas Line - Facility Interface Box (System) - Facility Interface Box (Per Line) - Future PM Containment - IGS/JTS Tool Kit - MFC Ergo Toll Kit - Service Ladder - Gas Box Hoist - Refurb, UPPER FR, JTS GB, VE, V2, ICHOR SING - 2300 Platform - 3 Open Cassette - WIDS Btm Read - 25 Slot Aux Buffer Station - Conditioning Station (4 Wafer) - User Interface: Side and Front Monitor U - Cable: TM Subpanel, 100ft - Sys Calibration and Alignment - Service Step for PM - Robot CDM - Rocker Valve Actuator Hoist - Rocker Vat Valve Service Kit - N309780 FB PF SHW RF Dummy Load - Assy 2300 Platform V2,V3,V4-UCAP SEA - 2300 PeripheralsOEMモデルの説明
The 2300 Versys Kiyo45 is a Reactive Ion Etch (RIE) system from Lam Research, part of the Kiyo Product Family. It is used to shape the electrically active materials of a semiconductor device with high precision and consistency. The Kiyo product family is known for its high-performance capabilities and productivity. The Versys Kiyo45 is used for various applications, including shallow trench isolation, source/drain engineering, high-k/metal gate, FinFET and tri-gate, and multi-patterning. It enables processing at sub-65 nm technology nodes.ドキュメント
ドキュメントなし