説明
-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.構成
Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)OEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
147928
ウェーハサイズ：
不明
ヴィンテージ：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 COBRA
カテゴリ
Dry / Plasma Etch
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
147928
ウェーハサイズ：
不明
ヴィンテージ：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.構成
Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)OEMモデルの説明
提供なしドキュメント
ドキュメントなし