説明

TACTRUS VIGUS ATCC Excluded Items List (Pumps, Chillers & Abatement are all excluded) Description Quantity TM Robot Controller 1 PM1 TMP Controller 1 PM1 Lifter Pin Driver 1

構成

System Type Description Quantity Options System Nitrogen Purge Storage and Controller 1 Factory Interface FOUP 3 Handler System Loader Module YASKAWA Model (XURC845M-C00) 1 Main System VIGUS Ix BSP Chamber 6 Others

OEMモデルの説明

Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. It provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL. The system is designed to deliver excellent wafer uniformity, low wafer-to-wafer variation, and high selectivity for thin film stop layers while maintaining a high etch rate. Up to 6 Vigus™ chambers can be installed on the Tactras™ platform. Tactras™ Vigus™ contributes to maximizing productivity for semiconductor manufacturers with industry-leading tool availability by minimizing offset in machine-to-machine and chamber-to-chamber with robust design, particle reduction techniques, introducing unit-assembly inspection method before shipment, and unique labor-saving automated functions. Overall, Tactras™ Vigus™ is a highly efficient and versatile etching system that offers many benefits to its users.