説明
Dry etch system構成
Known issues: Not included: TM Robot Controller; PM1 TMP Controller; PM1 Lifter Pin Driver (Qty 6) VIGUS Ix BSP Chamber YASKAWA Loader Module (Qty 3) FOUP Factory Interface Nitrogen Purge Storage and Controller Process: MHM Trench Software Version: Ver. 6.80 CIM: GEMOEMモデルの説明
Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. It provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL. The system is designed to deliver excellent wafer uniformity, low wafer-to-wafer variation, and high selectivity for thin film stop layers while maintaining a high etch rate. Up to 6 Vigus™ chambers can be installed on the Tactras™ platform. Tactras™ Vigus™ contributes to maximizing productivity for semiconductor manufacturers with industry-leading tool availability by minimizing offset in machine-to-machine and chamber-to-chamber with robust design, particle reduction techniques, introducing unit-assembly inspection method before shipment, and unique labor-saving automated functions. Overall, Tactras™ Vigus™ is a highly efficient and versatile etching system that offers many benefits to its users.ドキュメント
カテゴリ
Dry / Plasma Etch
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
136515
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2014
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
TACTRAS VIGUS
カテゴリ
Dry / Plasma Etch
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
136515
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2014
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available