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TEL / TOKYO ELECTRON TACTRAS
    説明
    Poly/RIE(NV/Step)
    構成
    Poly/RIE(NV/Step)
    OEMモデルの説明
    Tactras™ is a 300mm plasma etch system that enhances etch process productivity. It provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. The common base product design allows Tactras™ to be built for specific applications. The etch chambers that can be installed on Tactras™ employ optimal design technologies to achieve excellent within-wafer uniformity, low wafer-to-wafer variation, and high selectivity in shaping the etch profile. Up to 6 chambers can be installed on Tactras™, each capable of handling different etch applications as required. Tactras™ offers operational advantages enabled by TEL’s cumulative knowhow on production technology, including a robust design to minimize machine-to-machine and chamber-to-chamber variation, particle reduction technology, unit-assembly inspection, and labor-saving automation. All of these contribute to customers’ productivity.
    ドキュメント

    ドキュメントなし

    TEL / TOKYO ELECTRON

    TACTRAS

    verified-listing-icon

    検証済み

    カテゴリ
    Dry / Plasma Etch

    最終検証: 60日以上前

    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    97975


    ウェーハサイズ:

    不明


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    同様のリスト
    すべて表示
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma Etch
    ヴィンテージ: 2012状態: 中古
    最終確認60日以上前

    TEL / TOKYO ELECTRON

    TACTRAS

    verified-listing-icon
    検証済み
    カテゴリ
    Dry / Plasma Etch
    最終検証: 60日以上前
    listing-photo-66a15707567d44b38eeb4a836bb4bb8a-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    97975


    ウェーハサイズ:

    不明


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    説明
    Poly/RIE(NV/Step)
    構成
    Poly/RIE(NV/Step)
    OEMモデルの説明
    Tactras™ is a 300mm plasma etch system that enhances etch process productivity. It provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. The common base product design allows Tactras™ to be built for specific applications. The etch chambers that can be installed on Tactras™ employ optimal design technologies to achieve excellent within-wafer uniformity, low wafer-to-wafer variation, and high selectivity in shaping the etch profile. Up to 6 chambers can be installed on Tactras™, each capable of handling different etch applications as required. Tactras™ offers operational advantages enabled by TEL’s cumulative knowhow on production technology, including a robust design to minimize machine-to-machine and chamber-to-chamber variation, particle reduction technology, unit-assembly inspection, and labor-saving automation. All of these contribute to customers’ productivity.
    ドキュメント

    ドキュメントなし

    同様のリスト
    すべて表示
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma Etchヴィンテージ: 2012状態: 中古最終検証:60日以上前
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma Etchヴィンテージ: 0状態: 中古最終検証:13日前
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma Etchヴィンテージ: 0状態: 中古最終検証:60日以上前