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説明
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
ULVAC
NE-950EX
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
79016
ウェーハサイズ：
不明
ヴィンテージ：
2010
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説明
Host console- 125*300*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし