説明
• Provision 2E system leads the market in resolution, imaging quality, and throughput • Improved navigation for extreme accuracy; and sampling throughput 10 times faster than its predecessor • The PROVision 2E system is uniquely able to detect small, high aspect ratio, and under-layer defects, and measure CAD assisted massive CDU • By offering inspection and measurement in one tool, thePROVision 2E system saves production costs and improves yield • High resolution Hotspot and Area Inspection - pixels sizes 1nm-5nm • Over 1M data points per hour: fast motion and high current density • ADI layers inspection and CDU up to 150eV • Advanced imaging modes (HAR, Overlay, 3D): SE, BSE,Topography構成
Iprobe Range - 70pA-5nA Landing Energy - 150V - 15KV Image Resolution - 1.4nm @ ip=70pA 2.8nm @ ip=5nA Navigation Accuracy - ‡25nm based on AMAT BKM Pixel Size - 1nm - 5nm eTilt - 0° - 10° Topography Imaging - Yes (4Q detectors) BSE Imaging - Yes HAR - Yes Voltage Contrast - Yes TPT - 18K HS/hr based on AMAT BKM Detection Modes - D2Golden, D2D, C2C Measurements - 2D measurements CAD based Data Output - KLARF / CSV - CAD overlay over SEM image - High Quality OTF (including Image Enhancement)OEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
E-Beam
最終検証： 11日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
150106
ウェーハサイズ：
不明
ヴィンテージ：
2017
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
PROVision 2E
カテゴリ
E-Beam
最終検証： 11日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
150106
ウェーハサイズ：
不明
ヴィンテージ：
2017
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
• Provision 2E system leads the market in resolution, imaging quality, and throughput • Improved navigation for extreme accuracy; and sampling throughput 10 times faster than its predecessor • The PROVision 2E system is uniquely able to detect small, high aspect ratio, and under-layer defects, and measure CAD assisted massive CDU • By offering inspection and measurement in one tool, thePROVision 2E system saves production costs and improves yield • High resolution Hotspot and Area Inspection - pixels sizes 1nm-5nm • Over 1M data points per hour: fast motion and high current density • ADI layers inspection and CDU up to 150eV • Advanced imaging modes (HAR, Overlay, 3D): SE, BSE,Topography構成
Iprobe Range - 70pA-5nA Landing Energy - 150V - 15KV Image Resolution - 1.4nm @ ip=70pA 2.8nm @ ip=5nA Navigation Accuracy - ‡25nm based on AMAT BKM Pixel Size - 1nm - 5nm eTilt - 0° - 10° Topography Imaging - Yes (4Q detectors) BSE Imaging - Yes HAR - Yes Voltage Contrast - Yes TPT - 18K HS/hr based on AMAT BKM Detection Modes - D2Golden, D2D, C2C Measurements - 2D measurements CAD based Data Output - KLARF / CSV - CAD overlay over SEM image - High Quality OTF (including Image Enhancement)OEMモデルの説明
提供なしドキュメント
ドキュメントなし