説明
4 chamber capacity . Auto drain upgrade Stainless steel cabinet 1 Teflon 200mm chemical process chamber (CPC1) Tank 1: Heated DI/Glycerin Mix (premix) - supports CPC1 Tank 2: Heated H2SO4/Glycerin/DIW Mix (premix) - Supports CPC1 1 SS 200mm Low pressure chemical process chamber CPC2 Tank 3: Unheated IPA/DIW Mix (Premix) - Supports CPC2 Tank 4: Unheated IPA - Supports CPC2 Genmark Wafer Handling Robot Bulk Chemical Fill for all chemicals 10" PFA Chemical Filter Housings NEW Futurestar Flowmeters New 150mm wafer Handling Hardware (standard cassette designs only) New Front & Rear touchscreens (current OEM standard) New controller (current OEM standard) CO2 Fire Suppression System Operating Manual in CD only構成
2 chambersOEMモデルの説明
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.ドキュメント
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SEMITOOL
EQUINOX
カテゴリ
Electro Plating
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131774
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
4 chamber capacity . Auto drain upgrade Stainless steel cabinet 1 Teflon 200mm chemical process chamber (CPC1) Tank 1: Heated DI/Glycerin Mix (premix) - supports CPC1 Tank 2: Heated H2SO4/Glycerin/DIW Mix (premix) - Supports CPC1 1 SS 200mm Low pressure chemical process chamber CPC2 Tank 3: Unheated IPA/DIW Mix (Premix) - Supports CPC2 Tank 4: Unheated IPA - Supports CPC2 Genmark Wafer Handling Robot Bulk Chemical Fill for all chemicals 10" PFA Chemical Filter Housings NEW Futurestar Flowmeters New 150mm wafer Handling Hardware (standard cassette designs only) New Front & Rear touchscreens (current OEM standard) New controller (current OEM standard) CO2 Fire Suppression System Operating Manual in CD only構成
2 chambersOEMモデルの説明
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.ドキュメント
ドキュメントなし