説明
説明なし構成
- Panels 1 & 3 need replacing - Heating element type: MRL AZTEC HELIX - Oven 1,2,3 have Si tubes installed - Tube size: inner diameter = 220mm - Oven 2 includes SiC paddle (ovens 1,3,4 do not) - Configured for N2, O2, H2 - All gas lines have functioning and calibrated Mikrolys MFCs - Upgraded Eaton SPX2200 - Original board is operational - All 4 ovens have connected bubbler systems, integrated with N2 carrier flow - 2 original ABB boards used for controlling all 4 ovens - Functioning electro-preumatic control system with digital output - 16 new isolation adaptors fit between heating element and tubeOEMモデルの説明
提供なしドキュメント
ドキュメントなし
AMTECH / TEMPRESS
TS61004 LH
検証済み
カテゴリ
Furnaces / Diffusion
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
45590
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AMTECH / TEMPRESS
TS61004 LH
カテゴリ
Furnaces / Diffusion
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
45590
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
- Panels 1 & 3 need replacing - Heating element type: MRL AZTEC HELIX - Oven 1,2,3 have Si tubes installed - Tube size: inner diameter = 220mm - Oven 2 includes SiC paddle (ovens 1,3,4 do not) - Configured for N2, O2, H2 - All gas lines have functioning and calibrated Mikrolys MFCs - Upgraded Eaton SPX2200 - Original board is operational - All 4 ovens have connected bubbler systems, integrated with N2 carrier flow - 2 original ABB boards used for controlling all 4 ovens - Functioning electro-preumatic control system with digital output - 16 new isolation adaptors fit between heating element and tubeOEMモデルの説明
提供なしドキュメント
ドキュメントなし