説明
Product Description Vertical LPCVD Furnace Software version 6.80C Heater Type MRL Loader configuration, 4 or 5 loader - 4構成
Quartzware Configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz Adiabatic plate quantity: 6 Back N2, Qty: N/A BCl3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A SiH4, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L O2, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) E PH3, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L ClF3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A Vacuum Line configuration Design: original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting 10(F/S) 1000 Torr Baratron model MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control Table Alarm Watch/Table setting Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)) U: 0.7/0.7/30S CU 0.7/0.7/30S C: 0.7/0.7/30S CL 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)) 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)) MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3 N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5 SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7 SiH4: 2%/2%/10sec MFC8; 1%O2/Ar: 1%/1%/10sec MFC9 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec MFC13 N/A MFC14:N/A MFC15 N/A MFC16: N/A MFC17 N/A MFC18: N/A MFC19 N/A MFC20: N/A MFC21: N/A APC Valve Action (High (%), Low (%), Time(s)) N/A Transfer Table Wafer Charge command (charge/discharge) Side Dummy Upper:5 / Lower:10 Product 100 Monitor 5 Product & Monitor 105 Time 2nd charge time(min) 0 wafer cool time(min) 20min Leak Rate Table Base pressure low Limit(Torr) 1% Base pressure High Limit(Torr) 1% Leak Check check time(s) 60s Leak Check delay time(s) N/A Leak limit(Torr) 1% Retry Limit(count) 2 Loadlock Settings Loadlock configuration O2 analyser model, NGK or Toray PBI3.1 / PBI4.0 Process L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Ready L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Idle L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A L/A O2 check time (min) N/A L/A O2 limit (ppm) 10ppm POD opener O2 limit (ppm) N/A POD O2 check time(min) N/A POD check retry N/AOEMモデルの説明
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.ドキュメント
ドキュメントなし
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ASM
A412
カテゴリ
Furnaces / Diffusion
最終検証： 3日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117576
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Product Description Vertical LPCVD Furnace Software version 6.80C Heater Type MRL Loader configuration, 4 or 5 loader - 4構成
Quartzware Configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz Adiabatic plate quantity: 6 Back N2, Qty: N/A BCl3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A SiH4, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L O2, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) E PH3, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L ClF3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A Vacuum Line configuration Design: original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting 10(F/S) 1000 Torr Baratron model MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control Table Alarm Watch/Table setting Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)) U: 0.7/0.7/30S CU 0.7/0.7/30S C: 0.7/0.7/30S CL 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)) 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)) MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3 N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5 SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7 SiH4: 2%/2%/10sec MFC8; 1%O2/Ar: 1%/1%/10sec MFC9 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec MFC13 N/A MFC14:N/A MFC15 N/A MFC16: N/A MFC17 N/A MFC18: N/A MFC19 N/A MFC20: N/A MFC21: N/A APC Valve Action (High (%), Low (%), Time(s)) N/A Transfer Table Wafer Charge command (charge/discharge) Side Dummy Upper:5 / Lower:10 Product 100 Monitor 5 Product & Monitor 105 Time 2nd charge time(min) 0 wafer cool time(min) 20min Leak Rate Table Base pressure low Limit(Torr) 1% Base pressure High Limit(Torr) 1% Leak Check check time(s) 60s Leak Check delay time(s) N/A Leak limit(Torr) 1% Retry Limit(count) 2 Loadlock Settings Loadlock configuration O2 analyser model, NGK or Toray PBI3.1 / PBI4.0 Process L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Ready L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Idle L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A L/A O2 check time (min) N/A L/A O2 limit (ppm) 10ppm POD opener O2 limit (ppm) N/A POD O2 check time(min) N/A POD check retry N/AOEMモデルの説明
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.ドキュメント
ドキュメントなし