説明

Details Attached

構成

Configurations: ● Reactor 1 Nitride ○ MFC Type ■ Horiba Z512 — N2 — 100 sccm ■ Horiba Z512 — N2 — 100 sccm ■ Horiba Z512 — N2 — 1 SLM ■ Horiba Z512 — N2 — 5 SLM ■ Horiba Z512 — NH3 — 1 SLM ■ Horiba Z512 — NH3 — 1 SLM ■ Horiba Z512 — NH3 — 5 SLM ■ Horiba Z512 — DCS — 300 sccm ■ Horiba Z512 — DCS — 300 sccm ■ Horiba Z512 — H2 — 5 SLM ■ WHR purge Bronkhorst (loadlock) — N2 — 200 SLM ■ RC purge Bronkhorst (loadlock) — N2 — 300 SLM ■ Pressure control: CKD valve ■ Boat rotation: YES ■ Fast Ramp Element / Blower: YES ● Reactor 2 Nitride ○ MFC Type ■ Horiba Z512 — N2 — 100 sccm ■ Horiba Z512 — N2 — 100 sccm ■ Horiba Z512 — N2 — 1 SLM ■ Horiba Z512 — N2 — 5 SLM ■ Horiba Z512 — NH3 — 1 SLM ■ Horiba Z512 — NH3 — 1 SLM ■ Horiba Z512 — NH3 — 5 SLM ■ Horiba Z512 — DCS — 300 sccm ■ Horiba Z512 — DCS — 300 sccm ■ Horiba Z512 — H2 — 5 SLM ■ WHR purge Bronkhorst (loadlock) — N2 — 200 SLM ■ RC purge Bronkhorst (loadlock) — N2 — 300 SLM ■ Pressure control: CKD valve ■ Boat rotation: YES ■ Fast Ramp Element / Blower: YES

OEMモデルの説明

The Advance is our comprehensive range of batch vertical furnaces optimized to meet the needs of advanced semiconductor applications. Vertical batch processing increases productivity because a large stack of wafers can be loaded into the furnace chamber for simultaneous thermal processing.The A412 PLUS is for 300mm wafers.