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説明
Two BTI BDF-4 four-stack oxidation/diffusion furnaces configured for processing up to 6" wafers.. One furnace is right-handed (loading from right to left) and one is left-handed. Both furnaces are in good condition and come with spares.構成
Q&A 1.Process Type: Atmospheric? Wet Oxidation? Poly? Nitride?: Atmospheric used for oxidation (both wet and dry) and/or diffusion. 2. Left Hand or Right Hand?: Two furnaces, one is right hand and the other is left hand. 3. Cantilever/Softlander?: SiC cantilevers on all tubes. 4. External Torch?: Yes. Tubes come with H2/O2 custom steam torches. Refer to link above. 5. Gases: N2, O2, H2, HCL?: Furnace is configured with MFC's for N2, H2, O2, HCL and Ar. 6. Temperature requirements?: Maximum operating temperature rating: 1300 C. -More details attached.OEMモデルの説明
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PREFERRED
SELLER
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
Buyer pays 12% premium of final sale price
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
54548
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1984
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PREFERRED
SELLER
BRUCE
BDF-4
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
Buyer pays 12% premium of final sale price
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
54548
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1984
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available