説明

Horizontal diffusion furnace for POCl3 doping The centrotherm diffusion furnace offers the best available phosphorus diffusion and allows a solid realization of high emitter resistivity. The design supports the multiple process capability needs for the manufacturing of crystalline solar cells with maximum capacity and excellent process performance. The unique advantages of the batch-type system are the high flexibility towards varying production load and process sequence as well as the continued operation in case of tube maintenance or shut-down. Various configurations regarding process capability, capacity and automation level are available. Diffusion on both wafer sides (extended gettering effect of phosphorus improves material quality) Short cycle time and high availability due to redundancy. Highest cleanness (gas phase diffusion without residues) System configuration adjustable to production capacity (number of tubes, optional back-to-back loading) Fully automated boat handling guarantees maximized tube utilization Modular design allows easy installation and start-up 4 independently operated stacked quartz tube reactor chambers No thermal interference between different tubes due to advanced water cooling system Optionally available for low pressure processes Minimized facility heat load reduces cost of ownership Processes Diffusion (POCl3, BBr3) Annealing Wet and dry oxidation (optional: DCE, HCl)

構成

Datasheet and videos attached. Type: Horizontal diffusion furnace for POCl3 doping Version: 156 mm Condition: excellent Operational prior to de-installation 156mm Solar Cell line 4 tubes Schumacher bubblers Electronic Manuals included (German language) Includes quartz tubes. Was used with a Jonas and Redmann autoloader.