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説明
Dj-802V POLY Only #5 fork is broken構成
a: The furnace subsystem, which includes the following major components. . Automation system . Heater . Process chamber . Cooling water unit . Scavenger . Temperature controller b: The gas subsystem, which includes the following major components. Power box ( consists of the primary power supply and the power control system ) . Gas supply unit . Exhaust . Vacuum line ( for LPCVD systems ) . Temperature controller c: Power box ( consists of the primary power supply and the power control system ) d: Rapid cooling unit ( option for Fast Thermal Processing Systems ) e: Pump box ( option for LPCVD systems ) FURNACEOEMモデルの説明
DJ-802V for LPCVD. For LPCVD films, from 50 to 100 wafers are processed, depending on the film.ドキュメント
カテゴリ
Furnaces / Diffusion
最終検証： 15日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
104859
ウェーハサイズ：
不明
ヴィンテージ：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KOKUSAI-ELECTRIC (KE)
DJ-802V
カテゴリ
Furnaces / Diffusion
最終検証： 15日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
104859
ウェーハサイズ：
不明
ヴィンテージ：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available