An industrial vertical diffusion and chemical vapor deposition (CVD) furnace built for high-volume semiconductor manufacturing

KOKUSAI-ELECTRIC (KE)

DJ-853V-8BL3

System Layout -Main & Utility Integrated
System Type -L Type	
Side Maintenance - No Side Maintenance	
Furnace Front Surface Finish - Painted	
Rapid Cooling Unit	- Not Installed	
N2 Load Lock - Not Installed	
O2 Analyzer -Not Installed	
Cassette I/O Type (Normal / SMIF) -Normal I/O	
SMIF Maker / Model -Not Installed	
AGV Compatibility - Unable	
System Main Controller - CX3002B	
Mechanical Controller - CX1223	
Sequence Controller - OMRON CS1G	
Gas Controller - CX3202	
Gas Flow Chart Pannel - Not Installed	
Operation Pannel - Installed	
Signal Tower / Colors - Installed - 4 colors
Furnace Temperature Controller - CQ1600	
Furnace Overtemp Detector - DN-150V	
Gas Detecter Maker / Model - Not Installed	
Host Communications - Yes	
User Host Computer I/F- HSMS	
Manual (Drawing, Parts list etc) - Not Include	
Process Gas	N2 , NH3, DCS - Gas System
Integrated Gas System - Block style	
Manual Valve - FUJIKIN	
Air-Operated Valve - FUJIKIN	
Filter - MILLIPORE ( Ni )	
Regulator - VERIFLOW	
MFC Maker / Model - STEC / SEC-7330	
PT Sensor Maker / Model - NAGANO	
DPM Maker / Model - NAGANO	

Details Attached 
		

KE DJ-853V .pdf

432EC70F-FC16-4F32-9F9A-E2C277016446_1_201_a.jpeg

E570895C-6B50-4949-A2E3-7FF1E0792A03.jpeg

282C2544-C24A-4F7D-BD8D-6113852755DC_1_201_a.jpeg

04B4DAFD-B376-421B-9890-7A859C4A37E8_1_201_a.jpeg

05459DD1-1342-47A9-85D0-B0846CCBC53C_1_201_a.jpeg

CC64C368-35A4-4895-B2AF-3EAD4DD78397_1_201_a.jpeg

2356ED00-6DBF-468D-9A57-7ED573BE10F9.jpeg

455A0DE2-CC28-4665-B7B0-46B36E8ED898_1_201_a.jpeg

E0949D7B-FE59-4164-9E3B-2FFA9D056D02.jpeg

E9E64D2B-3927-435C-A954-ABD8FE8BA448_1_201_a.jpeg

DF421CF3-3426-43CB-AB4D-E316F8F65E12.jpeg

99A9B2F5-A934-4E4C-890D-7F3E0856E571.jpeg

6A9E6EFB-0A5C-4C6F-A962-2DE03C1EF4E8.jpeg

EF70BB8F-D4CA-49AD-BF48-EA858580A307.jpeg

76CC4098-D37A-4F1A-9F74-EAA4F7F46714.jpeg

8E2EAD34-0C9C-4C18-9E5C-58114F346C05.jpeg

5FA62AE2-5C0B-4723-ADE8-5C85C52C2F27_1_201_a.jpeg

DJ-853V-8BL3

カテゴリ

概要（Overview）

現在の掲載品

サービス

トップ掲載リスト

KOKUSAI-ELECTRIC (KE)

DJ-853V-8BL3

Moovに掲載品して、すぐに申し分ない購入者を見つけましょう。