説明

System Layout -Main & Utility Integrated System Type -L Type Side Maintenance - No Side Maintenance Furnace Front Surface Finish - Painted Rapid Cooling Unit - Not Installed N2 Load Lock - Not Installed O2 Analyzer -Not Installed Cassette I/O Type (Normal / SMIF) -Normal I/O SMIF Maker / Model -Not Installed AGV Compatibility - Unable System Main Controller - CX3002B Mechanical Controller - CX1223 Sequence Controller - OMRON CS1G Gas Controller - CX3202 Gas Flow Chart Pannel - Not Installed Operation Pannel - Installed Signal Tower / Colors - Installed - 4 colors Furnace Temperature Controller - CQ1600 Furnace Overtemp Detector - DN-150V Gas Detecter Maker / Model - Not Installed Host Communications - Yes User Host Computer I/F- HSMS Manual (Drawing, Parts list etc) - Not Include Process Gas N2 , NH3, DCS - Gas System Integrated Gas System - Block style Manual Valve - FUJIKIN Air-Operated Valve - FUJIKIN Filter - MILLIPORE ( Ni ) Regulator - VERIFLOW MFC Maker / Model - STEC / SEC-7330 PT Sensor Maker / Model - NAGANO DPM Maker / Model - NAGANO Details Attached

構成

Process: Nitride Process Gas - N2 , NH3, DCS Integrated Gas System - Block style Manual Valve - FUJIKIN Air-Operated Valve - FUJIKIN Filter - MILLIPORE ( Ni ) Regulator - VERIFLOW MFC Maker / Model - STEC / SEC-7330 PT Sensor Maker / Model - NAGANO DPM Maker / Model- NAGANO Check Valve - Not Installed Baking System - Not Installed Liquid Source Auto-Refill - Not Installed Burn Controller - Not Installed Veporizer - Not Installed Pump- Not Included Pressure Control Valve - CKD Pressure Controller - CKD Pressure Sensor - INFICON Trap - Installed Gas Cooler - Not Installed Wafer Type - 150 mm (6Inch) Auto Wafer Aligner - Not Installed Wafer Qty. in Cassette - 25 Cassette Storage Qty. - 18 Fork Type - 1 + 4 (VAC) - Vacuum tweezer type Fork-Wafer Presence Sensor - Installed Fork-Variable Pitch - Installed Magnetic Seal Rotation - Not Installed