TELINDY PLUS
概要(Overview)
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.
現在の掲載品
34
サービス
検査、保証、鑑定、ロジスティクス
TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 2010状態: 中古最終確認60日以上前TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 2010状態: 改修済み最終確認60日以上前TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 状態: 中古最終確認60日以上前TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 2013状態: 中古最終確認60日以上前
TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 2014状態: 中古最終確認60日以上前TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 2014状態: 中古最終確認60日以上前TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 2009状態: 中古最終確認60日以上前TEL / TOKYO ELECTRON
TELINDY PLUS
Furnaces / Diffusionヴィンテージ: 状態: 中古最終確認16日前