説明
Large beam ion implanter ABIT istar – High Current構成
Ion implantOEMモデルの説明
iStar is a low energy, high current batch mode ion implanter suitable for ultra shallow junction (USJ) formation for advanced technology nodes. Its tall beam design is a breakthrough technology that achieves high beam current (2mA) at extremely low energy (100eV) without sacrificing throughput. The low energy beam current for iStar is about 2x to 4x higher than other high current implanters AIBT claimed.ドキュメント
ADVANCED ION BEAM TECHNOLOGY INC (AIBT)
iSTAR
検証済み
カテゴリ
High Current
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Deinstalled
製品ID:
110022
ウェーハサイズ:
12"/300mm
ヴィンテージ:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ADVANCED ION BEAM TECHNOLOGY INC (AIBT)
iSTAR
カテゴリ
High Current
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Deinstalled
製品ID:
110022
ウェーハサイズ:
12"/300mm
ヴィンテージ:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available