説明
説明なし構成
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches Serial no. / Vintage IMP-039 / 1997 (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEMモデルの説明
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.ドキュメント
ドキュメントなし
APPLIED MATERIALS (AMAT) / VARIAN
E1000
検証済み
カテゴリ
High Current
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
106506
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT) / VARIAN
E1000
カテゴリ
High Current
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
106506
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches Serial no. / Vintage IMP-039 / 1997 (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEMモデルの説明
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.ドキュメント
ドキュメントなし