説明
Maskless exposure system構成
Automated substrate handling for low-volume manufacturing High-precision stage with contactless wedge-error compensation Self-calibration through integrated sensors Expandable to two exposure heads Separate control unit EVG CIM Framework software Automatic initialization and startup diagnostics PC-controlled operation Solid-state drive and hard drive Supported layout format: GDSIIOEMモデルの説明
LITHOSCALE is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication applications accommodating wafers up to 300 mm.ドキュメント
ドキュメントなし
カテゴリ
Lithography
最終検証： 20日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131095
ウェーハサイズ：
不明
ヴィンテージ：
2023
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVGROUP (EVG)
LITHOSCALE
カテゴリ
Lithography
最終検証： 20日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131095
ウェーハサイズ：
不明
ヴィンテージ：
2023
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Maskless exposure system構成
Automated substrate handling for low-volume manufacturing High-precision stage with contactless wedge-error compensation Self-calibration through integrated sensors Expandable to two exposure heads Separate control unit EVG CIM Framework software Automatic initialization and startup diagnostics PC-controlled operation Solid-state drive and hard drive Supported layout format: GDSIIOEMモデルの説明
LITHOSCALE is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication applications accommodating wafers up to 300 mm.ドキュメント
ドキュメントなし