説明
SUSS MA6 (With IR back microscope)構成
- Wafer Size: Capable of Exposure on Small Pieces up to 6”/150mm Diameter Wafers depending on tooling - Configured for Topside (TSA) Alignment and Bottom Side IR(BSA) - DVM6 - UV400 Optics (for 365nm and 405nm exposure - Includes 5x, 10x, 20x objectives - CIC 1000 Power Supply - 350W Lamphouse - Capable of Soft, Hard, Proximity and Vacuum Contacts (depending on tooling) - Includes (Qty 1) included 6” BSA chuck and mask holder 7 X 7 - Vibration Isolation Table (for SUSS MA6) - System Power: 230V, 50/60 HzOEMモデルの説明
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.ドキュメント
ドキュメントなし
カテゴリ
Mask/Bond Aligners
最終検証： 18日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
145113
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
SUSS MicroTec / KARL SUSS
MA6
カテゴリ
Mask/Bond Aligners
最終検証： 18日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
145113
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
SUSS MA6 (With IR back microscope)構成
- Wafer Size: Capable of Exposure on Small Pieces up to 6”/150mm Diameter Wafers depending on tooling - Configured for Topside (TSA) Alignment and Bottom Side IR(BSA) - DVM6 - UV400 Optics (for 365nm and 405nm exposure - Includes 5x, 10x, 20x objectives - CIC 1000 Power Supply - 350W Lamphouse - Capable of Soft, Hard, Proximity and Vacuum Contacts (depending on tooling) - Includes (Qty 1) included 6” BSA chuck and mask holder 7 X 7 - Vibration Isolation Table (for SUSS MA6) - System Power: 230V, 50/60 HzOEMモデルの説明
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.ドキュメント
ドキュメントなし