SiPHER
カテゴリ
Metrology概要（Overview）
The SiPHER is a fully automated photoluminescence metrology system for the detection and mapping of 300mm substrate defects and metallic contamination. SiPHER detects and quantifies near surface and bulk metallic contamination in both bulk silicon and silicon epitaxial layers.
現在の掲載品
2
サービス
検査、保証、鑑定、ロジスティクス
