説明

MOCVD Reactor GloveBox Carrier Door Status: Working and complete GB Glove Status: Working and complete LL pump(ACP) 2 ea Status: Working and complete Genmark Status: Working and complete Ebara pump (process pump): Not included Reactor Cart RT 2ea Status: Working and complete (3 for each) DRT 1ea Status: Working and complete Circulation pump Status: Working and complete Ferro Motor Status: Working and complete Transfer Hub Ion gauge Status: Working and complete Convection Status: Working and complete Baratron Status: Working and complete Turbo pump Status: Working and complete E Rack Main Breaker Status: Working and complete MC contactor Status: Working and complete SDA LAUDA bath number: 7 for each (Status: Working and complete) Eurotherm 3ea (Status: Working and complete) NEXUS PC Status: Working and complete Insitu PC Status: Working and complete SQL PC Status: Working and complete Main PCB Status: Working and complete Dnet scanner Status: Working and complete Dnet scanner PS Status: Working and complete

構成

See Schematic PDF in "Documents" Section below Wafer config: 6” (but can be set to any other wafer size) Config/Gases: AsH3 PH3 N2 H2, 8 Bubbler Slices Condition Used, all gas lines purged Status: cold steel (switched off)