ARCHER 600
カテゴリ
Overlay概要（Overview）
To help achieve sub-3nm overlay error for advanced logic and memory devices KLA introduced the Archer 600 imaging-based overlay metrology system. New optics in combination with innovative ProAIM targets deliver better resilience to process variations and improved correlation between measurement target and actual device pattern overlay errors, producing more accurate overlay measurements.
現在の掲載品
0
サービス
検査、保証、鑑定、ロジスティクス
トップ掲載リスト
- 製品が見つかりません