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PROVE
カテゴリ
Overlay概要（Overview）
PROVE® the next generation registration and overlay metrology system was successfully introduced into the market in 2010. It enables in-die measurement capability by means of high-resolution 193 nm optics, as well as optimized illumination for best contrast and pellicle compatibility.
現在の掲載品
1
サービス
検査、保証、鑑定、ロジスティクス
