説明
Deposition system構成
Dual loadlock EFEM, robot installed Transfer module (TM), robot installed Process modules: - CHA PECVD TEOS chamber with (Qty 2) heaters - CHB PECVD TEOS chamber with (Qty 1) heater, missing (Qty 1) heaterOEMモデルの説明
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.ドキュメント
ドキュメントなし
カテゴリ
PECVD
最終検証： 13日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
152528
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
PRODUCER III
カテゴリ
PECVD
最終検証： 13日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
152528
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Deposition system構成
Dual loadlock EFEM, robot installed Transfer module (TM), robot installed Process modules: - CHA PECVD TEOS chamber with (Qty 2) heaters - CHB PECVD TEOS chamber with (Qty 1) heater, missing (Qty 1) heaterOEMモデルの説明
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.ドキュメント
ドキュメントなし