説明
説明なし構成
Technical Specifications •Handles up to 200mm wafer diameter •lower temperatures (180° to 400°C) • Thicker films (≥20µm) Key Applications •low k • thermal films, high-temperature PECVD •SiO2,SiON,SiNx,A-Si •APF(Advance patterning film) •NFARL (nitrogen free anti-reflective layer) ASSETS OF PRODUCER III 1 AMAt TC Producer Model: Producer III 2 AMAt TC Producer Model: SE Carbon (GST) NIL 3 Heat Exchanger Model: SteelHead-0 4 DPA RF Generator Model: DPG-10 5 Amat Producer Gas Panel NIL 6 Dry Gas Abatement System Model: CS195SC 7 Dry Vacuum Pump Model:ADS602P 8 Dry Vacuum Pump Model:ADS602P 9 Dry Vacuum Pump Model:ADS602P 10 3 Phase Transformer of 160 kVAOEMモデルの説明
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.ドキュメント
カテゴリ
PECVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131951
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
PRODUCER III
カテゴリ
PECVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131951
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available