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説明
All MFCs for above processes are operational bar the Silane one構成
PECVD 80+ SiNx Dep Functional tool Designed for 4” wafers but can do 6” Deposits SiO2, SiH4 & Amorphous Si @ 300c Has working MFCs to achieve above deposition Is an OIPT tool built 1998 Burner gas abatement Control PC Edwards E2M80 vacuum pump Rf GeneratorOEMモデルの説明
The Oxford Plasmalab80Plus is a compact plasma processing system that can perform high-quality plasma-enhanced chemical vapor deposition (PECVD) of materials such as SiOx, SiNx, and SiOxNy. This system is suitable for a variety of applications, including the creation of photonics structures, passivation, and hard masks. The Plasmalab80Plus has a small footprint and offers versatile etch and deposition solutions with easy open loading. It is simple to install and operate, while still delivering excellent process quality. The open load design allows for quick wafer loading and unloading, making it ideal for research, prototyping, and low-volume production. The system also enables high-performance processes through optimized electrode cooling and precise substrate temperature control.ドキュメント
ドキュメントなし
カテゴリ
PECVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
96391
ウェーハサイズ：
4"/100mm, 6"/150mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
OXFORD
PLASMALAB 80 PLUS
カテゴリ
PECVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
96391
ウェーハサイズ：
4"/100mm, 6"/150mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
All MFCs for above processes are operational bar the Silane one構成
PECVD 80+ SiNx Dep Functional tool Designed for 4” wafers but can do 6” Deposits SiO2, SiH4 & Amorphous Si @ 300c Has working MFCs to achieve above deposition Is an OIPT tool built 1998 Burner gas abatement Control PC Edwards E2M80 vacuum pump Rf GeneratorOEMモデルの説明
The Oxford Plasmalab80Plus is a compact plasma processing system that can perform high-quality plasma-enhanced chemical vapor deposition (PECVD) of materials such as SiOx, SiNx, and SiOxNy. This system is suitable for a variety of applications, including the creation of photonics structures, passivation, and hard masks. The Plasmalab80Plus has a small footprint and offers versatile etch and deposition solutions with easy open loading. It is simple to install and operate, while still delivering excellent process quality. The open load design allows for quick wafer loading and unloading, making it ideal for research, prototyping, and low-volume production. The system also enables high-performance processes through optimized electrode cooling and precise substrate temperature control.ドキュメント
ドキュメントなし