説明
the pc can be power on, but chamber is already vacuum packed構成
OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.OEMモデルの説明
The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.ドキュメント
ドキュメントなし
カテゴリ
PECVD
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
139842
ウェーハサイズ：
不明
ヴィンテージ：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 PECVD
カテゴリ
PECVD
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
139842
ウェーハサイズ：
不明
ヴィンテージ：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
the pc can be power on, but chamber is already vacuum packed構成
OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.OEMモデルの説明
The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.ドキュメント
ドキュメントなし