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OXFORD PLASMAPRO NGP1000
  • OXFORD PLASMAPRO NGP1000
  • OXFORD PLASMAPRO NGP1000
  • OXFORD PLASMAPRO NGP1000
  • OXFORD PLASMAPRO NGP1000
説明
450mm wafer capable, Load-Lock Chamber
構成
Oxford PlasmaPro NGP1000 PECVD - Load Locked Chamber - System PC, Keyboard, Mouse - Windows 7 w/ PC4000 Control Software - X20 PLC - 490mm Diameter Aluminum Lower Electrode - Capable of running up 450mm wafers - Up to 400 degrees Celcius - Chamber Heating Kit (Heats Chamber Sidewalls to Minimize Process Deposition) - Dual Frequency RF with Pulsing for Film Stress Control - 600W 13.56Mhz HF RF Generator - 600W 2Mhz LF RF Generator - Pneumatic Chamber Lift Kit - Adixen ADS602P Dry Pump for Process Chamber - Adixen ACP40G for Load Lock - Operations Manual and Documentation X20 External Gas Box with up to 12 Gas Lines. Currently Configured for: - He - CF4 - N2 - N20 - NH3 - SiH4-N2
OEMモデルの説明
The PlasmaPro NGP1000 from Oxford Instruments is a tool that uses plasma etching and deposition to deposit layers of SiO2 and SiNx. It is part of the PlasmaPro NGP1000 HBLED series of tools. The system features a large electrode and a specially designed showerhead, which allows it to accommodate up to 61 x 2”, 15 x 4” or 7 x 6” wafers at once. This tool is specifically designed to provide exceptional advantages for manufacturers of HBLEDs.
ドキュメント

ドキュメントなし

カテゴリ
PECVD

最終検証: 60日以上前

主なアイテムの詳細

状態:

Refurbished


稼働ステータス:

不明


製品ID:

77527


ウェーハサイズ:

15"/450mm


ヴィンテージ:

2012


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

OXFORD

PLASMAPRO NGP1000

verified-listing-icon
検証済み
カテゴリ
PECVD
最終検証: 60日以上前
listing-photo-c597c1fd18cf4fdf911fb34a558c90a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/c597c1fd18cf4fdf911fb34a558c90a0/061ea2fff1494275abe3fb4654c65529_a3022001f28640b893f77d20ff1dfb331201a_mw.jpeg
listing-photo-c597c1fd18cf4fdf911fb34a558c90a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/c597c1fd18cf4fdf911fb34a558c90a0/5e2d398bd1c24a809f543f4136a41eff_b3e976ade4d3453886b51dac37e74617_mw.png
listing-photo-c597c1fd18cf4fdf911fb34a558c90a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/c597c1fd18cf4fdf911fb34a558c90a0/d9e9beac215f4c6ea19b46800b3a85fc_87fc322f295c4d76bfc96a113d0d95101201a_mw.jpeg
listing-photo-c597c1fd18cf4fdf911fb34a558c90a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/c597c1fd18cf4fdf911fb34a558c90a0/6fbb35ffa82a4b70a3a2b6746449d190_b2e5afc213bc4e28bdee24b8322376601201a_mw.jpeg
主なアイテムの詳細

状態:

Refurbished


稼働ステータス:

不明


製品ID:

77527


ウェーハサイズ:

15"/450mm


ヴィンテージ:

2012


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
450mm wafer capable, Load-Lock Chamber
構成
Oxford PlasmaPro NGP1000 PECVD - Load Locked Chamber - System PC, Keyboard, Mouse - Windows 7 w/ PC4000 Control Software - X20 PLC - 490mm Diameter Aluminum Lower Electrode - Capable of running up 450mm wafers - Up to 400 degrees Celcius - Chamber Heating Kit (Heats Chamber Sidewalls to Minimize Process Deposition) - Dual Frequency RF with Pulsing for Film Stress Control - 600W 13.56Mhz HF RF Generator - 600W 2Mhz LF RF Generator - Pneumatic Chamber Lift Kit - Adixen ADS602P Dry Pump for Process Chamber - Adixen ACP40G for Load Lock - Operations Manual and Documentation X20 External Gas Box with up to 12 Gas Lines. Currently Configured for: - He - CF4 - N2 - N20 - NH3 - SiH4-N2
OEMモデルの説明
The PlasmaPro NGP1000 from Oxford Instruments is a tool that uses plasma etching and deposition to deposit layers of SiO2 and SiNx. It is part of the PlasmaPro NGP1000 HBLED series of tools. The system features a large electrode and a specially designed showerhead, which allows it to accommodate up to 61 x 2”, 15 x 4” or 7 x 6” wafers at once. This tool is specifically designed to provide exceptional advantages for manufacturers of HBLEDs.
ドキュメント

ドキュメントなし