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説明
Tencor P-20(H) Step Height Measurement System - Long Scan Profiler Measurement. - Micro Head with L type stylus. - Installed in Clean-room.構成
- Measurement Range: 100 ~ 0.3mm Height. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - 486DX PC & LCD Color Monitor, Windows 3.1. - Option: Precision Locator,Wafer Handler. - Utility: Vacuum. - Power: 110V/50HZ, 4A. - Anti-bivration table.OEMモデルの説明
提供なしドキュメント
ドキュメントなし
KLA
P-20H
カテゴリ
Profiler
最終検証： 60日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
65997
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
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説明
Tencor P-20(H) Step Height Measurement System - Long Scan Profiler Measurement. - Micro Head with L type stylus. - Installed in Clean-room.構成
- Measurement Range: 100 ~ 0.3mm Height. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - 486DX PC & LCD Color Monitor, Windows 3.1. - Option: Precision Locator,Wafer Handler. - Utility: Vacuum. - Power: 110V/50HZ, 4A. - Anti-bivration table.OEMモデルの説明
提供なしドキュメント
ドキュメントなし