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説明
説明なし構成
構成なしOEMモデルの説明
The HRP-240 is an automated high-resolution surface metrology tool that provides long scan profilometry and high-resolution imaging for CMP and Etch applications. It has a new Dipping Mode™ capability for high aspect ratio depth monitoring and is reliable and easy to use for high-speed step height monitoring. It is the best solution for topographic metrology for wafer sizes up to 200 mm and can be configured as a basic profiler or a high-resolution, high aspect ratio instrument.ドキュメント
ドキュメントなし
KLA
HRP-240
カテゴリ
Profiler
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117561
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
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説明
説明なし構成
構成なしOEMモデルの説明
The HRP-240 is an automated high-resolution surface metrology tool that provides long scan profilometry and high-resolution imaging for CMP and Etch applications. It has a new Dipping Mode™ capability for high aspect ratio depth monitoring and is reliable and easy to use for high-speed step height monitoring. It is the best solution for topographic metrology for wafer sizes up to 200 mm and can be configured as a basic profiler or a high-resolution, high aspect ratio instrument.ドキュメント
ドキュメントなし