説明
PVD構成
150mm Narrow Body Load Lock Through the Wall Installation Water cooled Cryo compressor MFC: STEC 4400 Chamber 1 AlPVD Standard body Heater type: 4F Chamber 2 Ti PVD Wide Body Chamber 3 AlPVD Standard Body Heater type: 4FOEMモデルの説明
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.ドキュメント
ドキュメントなし
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
104976
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
ENDURA 5500
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
104976
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
PVD構成
150mm Narrow Body Load Lock Through the Wall Installation Water cooled Cryo compressor MFC: STEC 4400 Chamber 1 AlPVD Standard body Heater type: 4F Chamber 2 Ti PVD Wide Body Chamber 3 AlPVD Standard Body Heater type: 4FOEMモデルの説明
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.ドキュメント
ドキュメントなし