説明
説明なし構成
- PVD (2), Etch Chamber (1) - Loadlock Chambers (2) - Transfer Chamber (1) - Some broken parts, TMP for Lordlock and Transfer chamber Configuration(upper floor) - 2 L/L(VCB), - 1 Transfer Chamber, - 2 Depo(Sputter) - 1 Etch(HSE), - 3 Controller Raack - (AC Power, DC power Supply Vacuum Cont, Controller) Down Floor - 2 Cryo Compressor(CTI 9600), - 4 Dry Pump(SDE90), - 2 Chiller - 470VAC Transformer Failure - L/L(VCB) Contrtoller - VCB Bà: Door Close failure and Switching from Rough to Turbo - Etch CH（HSE）Controller: Switch to Depo A - ESC for Depo A does not work but new spare ESC availableOEMモデルの説明
The SPTS Sigma FxP is a physical vapor deposition (PVD) system for 4-12" power device manufacturing. Applications fo the SPTS Sigma FxP include frontside thick Al and thin wafer backside processing. The Sigma fxP carries thin wafer handling hardware and uses film deposition stress control techniques to deliver high throughput processes with low wafer bow. Sigma fxP - a cluster system supporting up to 6 PVD chambers (including associated pre-clean/degas module options). The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.ドキュメント
ドキュメントなし
KLA / SPTS
SIGMA fxP
検証済み
カテゴリ
PVD / Sputtering
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
84170
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
SIGMA fxP
カテゴリ
PVD / Sputtering
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
84170
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
- PVD (2), Etch Chamber (1) - Loadlock Chambers (2) - Transfer Chamber (1) - Some broken parts, TMP for Lordlock and Transfer chamber Configuration(upper floor) - 2 L/L(VCB), - 1 Transfer Chamber, - 2 Depo(Sputter) - 1 Etch(HSE), - 3 Controller Raack - (AC Power, DC power Supply Vacuum Cont, Controller) Down Floor - 2 Cryo Compressor(CTI 9600), - 4 Dry Pump(SDE90), - 2 Chiller - 470VAC Transformer Failure - L/L(VCB) Contrtoller - VCB Bà: Door Close failure and Switching from Rough to Turbo - Etch CH（HSE）Controller: Switch to Depo A - ESC for Depo A does not work but new spare ESC availableOEMモデルの説明
The SPTS Sigma FxP is a physical vapor deposition (PVD) system for 4-12" power device manufacturing. Applications fo the SPTS Sigma FxP include frontside thick Al and thin wafer backside processing. The Sigma fxP carries thin wafer handling hardware and uses film deposition stress control techniques to deliver high throughput processes with low wafer bow. Sigma fxP - a cluster system supporting up to 6 PVD chambers (including associated pre-clean/degas module options). The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.ドキュメント
ドキュメントなし