説明
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1構成
Software Version SL4.2.24OEMモデルの説明
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.ドキュメント
ドキュメントなし
検証済み
カテゴリ
Reticle / Mask Inspection
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
144643
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SL3UV URSA
カテゴリ
Reticle / Mask Inspection
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
144643
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1構成
Software Version SL4.2.24OEMモデルの説明
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.ドキュメント
ドキュメントなし