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6" Fab For Sale from Moov - Click Here to Learn More

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6" Fab For Sale from Moov - Click Here to Learn More

MATTSON / STEAG / AST 3000

説明

Single Chamber RTP with 3 Load/unloaders - Operational Condition

構成

RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660

OEMモデルの説明

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

ドキュメント

ファイルアイコン

Mattson. AST3000,mov.mov

ファイルアイコン

MattsonAST3000.mov

ファイルアイコン

Mattson AST3000.mov

ファイルアイコン

Mattson. AST3000.mov

ファイルアイコン

Mattson AST3000 .mov

ファイルアイコン

MattsonAST3000 .mov

MATTSON / STEAG / AST

3000

verified-listing-icon

検証済み

カテゴリ

RTP/RTA

最終検証： 60日以上前

主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

59225

ウェーハサイズ：

8"/200mm

ヴィンテージ：

2000

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

同様のリスト

すべて表示

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

ヴィンテージ： 2000状態：中古

最終確認60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

ヴィンテージ： 2002状態：中古

最終確認60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

ヴィンテージ： 0状態：中古

最終確認60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

ヴィンテージ： 0状態：中古

最終確認60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

ヴィンテージ： 2007状態：中古

最終確認60日以上前

MATTSON / STEAG / AST

3000

verified-listing-icon

検証済み

カテゴリ

RTP/RTA

最終検証： 60日以上前

listing-photo-b11245cdcb8a42b6a256c86b10f06eeb-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1702/b11245cdcb8a42b6a256c86b10f06eeb/2fe830397fef45eba8bd6d519481cfeb_0af1d1b6c03f4154898fb3315031114345005c_mw.jpeg

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主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

59225

ウェーハサイズ：

8"/200mm

ヴィンテージ：

2000

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

説明

Single Chamber RTP with 3 Load/unloaders - Operational Condition

構成

RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660

OEMモデルの説明

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

ドキュメント

ファイルアイコン

Mattson. AST3000,mov.mov

ファイルアイコン

MattsonAST3000.mov

ファイルアイコン

Mattson AST3000.mov

ファイルアイコン

Mattson. AST3000.mov

ファイルアイコン

Mattson AST3000 .mov

ファイルアイコン

MattsonAST3000 .mov

同様のリスト

すべて表示

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAヴィンテージ： 2000状態：中古最終検証：60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAヴィンテージ： 2002状態：中古最終検証：60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAヴィンテージ： 0状態：中古最終検証：60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAヴィンテージ： 0状態：中古最終検証：60日以上前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAヴィンテージ： 2007状態：中古最終検証：60日以上前