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説明
AST SUPER HEAT SYSTEM構成
-Software Version: DOS 2.0 -CIM: GEM -Process: RTP -Handler System: PRI ALIGNER (1) OK -Options System: PRI ROBOT ATM307 (1) OKOEMモデルの説明
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.ドキュメント
ドキュメントなし
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
111960
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
MATTSON / STEAG / AST
2800
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
111960
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
AST SUPER HEAT SYSTEM構成
-Software Version: DOS 2.0 -CIM: GEM -Process: RTP -Handler System: PRI ALIGNER (1) OK -Options System: PRI ROBOT ATM307 (1) OKOEMモデルの説明
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.ドキュメント
ドキュメントなし