概要（Overview）

The Nova NanoSEM 600 is a type of high-resolution scanning electron microscope (SEM) that comes equipped with SED, BSED, and STEM detectors. It is a Dual Beam SEM/FIB system that combines the capabilities of ultra-high resolution field emission Scanning Electron Microscopy (SEM) with the precision of Focused Ion Beam (FIB) etching and deposition, making it ideal for nanoscale prototyping, machining, characterization, and analysis. When operating in STEM mode, this microscope can achieve a resolution as low as 1 nanometer. Additionally, the Nova NanoSEM 600 is capable of operating under low vacuum conditions and offers a range of analytical options including EBSD and EDS.