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説明
ANALYTICAL EQUIPMENT構成
Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2.0nm (1kV, WD-1.5mm, Normal mode) Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 axis motorized Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Operating System: Windows XP Professional Options: 1. Joystick for stage control 2. CD Measurement Function 3. RS-232C 4. Deceleration function 5. Video Amplifier unit 6. 200mm load lock (upgrade from 150mm)OEMモデルの説明
Field Emission Scanning Electron Microscopeドキュメント
ドキュメントなし
同様のリスト
すべて表示
HITACHI
S-4800 II
カテゴリ
SEM / FIB
最終検証： 60日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
23573
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2004
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説明
ANALYTICAL EQUIPMENT構成
Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.4nm (1kV, WD=1.5mm, Deceleration mode) 2.0nm (1kV, WD-1.5mm, Normal mode) Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 axis motorized Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Operating System: Windows XP Professional Options: 1. Joystick for stage control 2. CD Measurement Function 3. RS-232C 4. Deceleration function 5. Video Amplifier unit 6. 200mm load lock (upgrade from 150mm)OEMモデルの説明
Field Emission Scanning Electron Microscopeドキュメント
ドキュメントなし