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説明
Hitachi SU8040 w/o EDS構成
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEMモデルの説明
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.ドキュメント
ドキュメントなし
HITACHI
SU8040
カテゴリ
SEM / FIB
最終検証： 60日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
117549
ウェーハサイズ：
不明
ヴィンテージ：
2012
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説明
Hitachi SU8040 w/o EDS構成
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEMモデルの説明
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.ドキュメント
ドキュメントなし