説明
Hitachi SU8040 w/o EDS構成
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEMモデルの説明
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.ドキュメント
ドキュメントなし
HITACHI
SU8040
検証済み
カテゴリ
SEM / FIB
最終検証： 19日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117550
ウェーハサイズ：
不明
ヴィンテージ：
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
SU8040
カテゴリ
SEM / FIB
最終検証： 19日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117550
ウェーハサイズ：
不明
ヴィンテージ：
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Hitachi SU8040 w/o EDS構成
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEMモデルの説明
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.ドキュメント
ドキュメントなし