説明
説明なし構成
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEMモデルの説明
提供なしドキュメント
ドキュメントなし
ZEISS / CARL ZEISS
1560
検証済み
カテゴリ
SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Idle
製品ID：
96898
ウェーハサイズ：
4"/100mm, 6"/150mm
ヴィンテージ：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ZEISS / CARL ZEISS
1560
カテゴリ
SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Idle
製品ID：
96898
ウェーハサイズ：
4"/100mm, 6"/150mm
ヴィンテージ：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEMモデルの説明
提供なしドキュメント
ドキュメントなし