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市場 > Steppers & Scanners > ASML > PAS 5500/100D

PAS 5500/100D

概要(Overview)

Designed for mass production at 0.4 µm and achieves extremely high throughout while maintaining versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of subhalf-micron design rules by optimizing both depth of focus and resolution for critical process layers. NA:0.60

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