説明
This system is engineered for 8-inch wafer fabrication, with a certified 0.35μm process resolution performance guarantee. The unit is in stock and will be delivered on an as-is basis per its current on-site condition.構成
This system is engineered for 8-inch wafer fabrication, with a certified 0.35μm process resolution performance guarantee. The unit is in stock and will be delivered on an as-is basis per its current on-site condition.OEMモデルの説明
The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.ドキュメント
ドキュメントなし
検証済み
カテゴリ
Steppers & Scanners
最終検証： 16日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Crated
製品ID：
152317
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
CANON
FPA-3000i4
カテゴリ
Steppers & Scanners
最終検証： 16日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Crated
製品ID：
152317
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
This system is engineered for 8-inch wafer fabrication, with a certified 0.35μm process resolution performance guarantee. The unit is in stock and will be delivered on an as-is basis per its current on-site condition.構成
This system is engineered for 8-inch wafer fabrication, with a certified 0.35μm process resolution performance guarantee. The unit is in stock and will be delivered on an as-is basis per its current on-site condition.OEMモデルの説明
The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.ドキュメント
ドキュメントなし