説明
Step and Repeat System 23.11.08 Converted from 6 to 8 inch構成
Step and Repeat System 23.11.08 Converted from 6 to 8 inch Open VMS Altitude - Sea Level Resolution - 0.40 um Computer Type - Vax Station with Expansion unit Software - Reticle size - 6 Movable Microscopes - Yes Wafer size - 8 inch Notch Illuminator Type - 1.75 kW Shrinc - Shrinc 3 Moveable NA - Yes Reticle Libraries - 1 PPD - Yes Bar code reader - Yes Wafer loader indexers - 2 Wafer loader type Type - 2 Wafer Loader Prealignment 2 - Yes Wafer Loader In Line - Left FIA - Yes LSA - Yes Chip levelling - Yes Autococus - Yes VRA - Yes FC2 - Yes Ceramic 3 pin ring chuck - YesOEMモデルの説明
The NSR-2205i11C is equipped with a resolution of 450nm or better and features a numerical aperture (NA) of 0.57. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system comes with the LSA alignment system as standard and offers the optional FIA and LIA alignment systems.ドキュメント
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105383
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
NIKON
NSR-2205i11C
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105383
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available