説明

The system is a thermal evaporator. It can use either a filament (such as chrome), or pellets (such as gold) in a boat (typically made of Tungsten) as the evaporation source. The carousel-type system is called a dome. We have a dome with the evaporator for holding multiple substrates. It is also fairly simple to custom order a dome. The dome we have can accommodate 7 substrates (3'' in diameter). We have also made custom plates to accommodate 7 substrates of 2'' x 3'' size.

構成

Denton Vacuum Integrity 14 Thermal Evaporator with Cryo pump - What material is currently being evaporated & will the chamber be cleaned so there is no contamination? Cr and Au. - Does it come with the cryo unit? Yes - Details of elect, air, and H2) requirements? Electrical: 208Vac , single phase, 40 Amps, 4 wire (L1, L2, Neutral, ground)  Compressed Air: (80-90)PSI , 1/4 inch Swagelock fitting N2 Vent gas: (5-10)PSI , 1/4 inch Swagelock fitting  Cooling Water: 1.0 -1.5 GPM ( LOW Voltage feedthroughs and Crytal monitor cooling only)  - Is there new wiring schematics and written operating instructions? Original manual from Denton.

OEMモデルの説明

"The Denton Vacuum Integrity system is configured for demanding optical, semiconductor and compound semiconductor applications. This solution offers high yield, stress control, high deposition rate, PID control, optimal grain size and film crystallography. Denton offers application-specific tools pre-configured to meet demanding process requirements."