説明
Surface Charge Analyzer構成
構成なしOEMモデルの説明
A non-contact, corona-based silicon and oxide charge monitoring system configured for wafer-to-wafer cassette handling of 200 mm wafers. System measures electrical characteristics such as charge composition, interface quality, dielectric thickness, and charge contamination of semiconductors and dielectric films. Measurements performed with easy to use Windows NT-based software interface. An Offline Recipe Generator and Data Analysis package provides added remote recipe generation and data analysis capabilities.ドキュメント
ドキュメントなし
カテゴリ
Thin Film / Film Thickness
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
142960
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KEITHLEY
Quantox 64000
カテゴリ
Thin Film / Film Thickness
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
142960
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Surface Charge Analyzer構成
構成なしOEMモデルの説明
A non-contact, corona-based silicon and oxide charge monitoring system configured for wafer-to-wafer cassette handling of 200 mm wafers. System measures electrical characteristics such as charge composition, interface quality, dielectric thickness, and charge contamination of semiconductors and dielectric films. Measurements performed with easy to use Windows NT-based software interface. An Offline Recipe Generator and Data Analysis package provides added remote recipe generation and data analysis capabilities.ドキュメント
ドキュメントなし