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説明
NO MISSING PARTS Software - Version Summit 2.61 CIM - SECS Process - Film Thickness measurement tool構成
Hardware Configuration ( FAB ) System Type Description Quantity Status Main System Main body 1 OK Others NA 0 OK Factory Interface SMIF 1 OK Handler System Robot & Pre-aligner 1 OK Options System NA 0 OK Hardware Configuration (Subfab/Auxilliary Units ) Description Quantity Status NA 0 Ok Missing/Faulty Parts / Accesorries List Description Quantity NA 0OEMモデルの説明
The Prometrix UV-1280SE is a production thin film measurement system that combines dual-beam spectrophotometry and broadband spectroscopic ellipsometry. It can directly measure film thickness, refractive index, and extinction coefficient of single- and multi-layer thin film stacks simultaneously. The system is easy to use, lowers cost of ownership, and increases production efficiency. It is useful for both process control and advanced materials development.ドキュメント
同様のリスト
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KLA
UV-1280SE
カテゴリ
Thin Film / Film Thickness
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
121275
ウェーハサイズ：
不明
ヴィンテージ：
1999
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