説明

NO MISSING PARTS Software - Version Summit 2.61 CIM - SECS Process - Film Thickness measurement tool

構成

Hardware Configuration ( FAB ) System Type Description Quantity Status Main System Main body 1 OK Others NA 0 OK Factory Interface SMIF 1 OK Handler System Robot & Pre-aligner 1 OK Options System NA 0 OK Hardware Configuration (Subfab/Auxilliary Units ) Description Quantity Status NA 0 Ok Missing/Faulty Parts / Accesorries List Description Quantity NA 0

OEMモデルの説明

The Prometrix UV-1280SE is a production thin film measurement system that combines dual-beam spectrophotometry and broadband spectroscopic ellipsometry. It can directly measure film thickness, refractive index, and extinction coefficient of single- and multi-layer thin film stacks simultaneously. The system is easy to use, lowers cost of ownership, and increases production efficiency. It is useful for both process control and advanced materials development.