説明
Asset Description - TRF6 SEZ SP-223 POST ETCH POLYMER REMOVAL F067PE0599M0X04 Software Version - 4.0.7 CIM - SEC GEM Process - POST ETCH POLYMER REMOVAL構成
System Type Description Quantity Status Handler System Single wafer process 1 OK Factory Interface SMIF 4 OK Options System CDS 3 OK Main System main unit 1 OK Others NA 0OEMモデルの説明
The SEZ 223 is a spin-processing system designed for high throughput cleaning and film removal applications for semiconductor wafer processing. It has a robot that transports 200mm wafers from four cassettes to two identical process chambers, capable of applying up to three chemicals each. The system has an object-oriented software architecture with a Sematech compliant GUI and Touch Screen. It also has options like Offline process editor, Mini-Environment, DIW-Ozone Processing, SMIF, AGV, Frontside handling, Film Removal End Point Detection, and more. It supports applications such as Copper Backside & Wraparound Clean, Other Backside Metal Cleans, Backside Film Removal, Wafer Reclaim, Post-etch Polymer Removal, Oxide Etching, and Post-CMP-Cleaning.ドキュメント
カテゴリ
Wet Etch
最終検証： 2日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
137323
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH / SEZ
SP223
カテゴリ
Wet Etch
最終検証： 2日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
137323
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available