説明
Single Wafer Processing構成
Currently Configured for: 300mm Current Equipment Status: Available Available date: Currently Available The equipment use of destructive methods to deinstallation the equipment. Damage/Missing parts list, please inspect tool to reconfirm. Dry pumps and customer provided items not included on sales. Inspect to confirm configuration and condition. The DC Power supply is missing and Heater is damaged. Install Type is Stand-Alone Date of last PM is 2014 The system not On-Line SEZ Spin Processor Model is SP304 UI (Front) is present Status Lamp is present Chuck Size (Left) is 12 Chuck Size (Right) is 12 Ionizer system No Flip Module No End Point Detection System Horiba concentration Monitor (HF Monitor) ULPA Filter (Top of Main Unit) FFU Replacement Date is 2013 Robot Support Plate is Present Robot - CNTRL Filter Replacement Date is 2013 Suck Back Box w/NT flow meter & manual reset Number of Load-ports is 2 std Load-port Size (Left) is 12 Load-port Size (Right) is 12 No Load-port Adapters (12->8) No Wafer ID Reader No RFID Reader Chemical Module 1 is SC1 Chemical Module 2 is HF 49% Chemical Module 3 is H2SO4 Chemical Delivery System (CDS) is CDS Buffer System for Chemical Cabinet No Bulk Chem Delivery system (BCD)_Active No Bulk Chem Delivery system (BCD)_Passive All Cables are present There are missing or damaged partsOEMモデルの説明
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.ドキュメント
ドキュメントなし
LAM RESEARCH / SEZ
SP304
検証済み
カテゴリ
Wet Etch
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
48207
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP304
検証済み
カテゴリ
Wet Etch
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
48207
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Single Wafer Processing構成
Currently Configured for: 300mm Current Equipment Status: Available Available date: Currently Available The equipment use of destructive methods to deinstallation the equipment. Damage/Missing parts list, please inspect tool to reconfirm. Dry pumps and customer provided items not included on sales. Inspect to confirm configuration and condition. The DC Power supply is missing and Heater is damaged. Install Type is Stand-Alone Date of last PM is 2014 The system not On-Line SEZ Spin Processor Model is SP304 UI (Front) is present Status Lamp is present Chuck Size (Left) is 12 Chuck Size (Right) is 12 Ionizer system No Flip Module No End Point Detection System Horiba concentration Monitor (HF Monitor) ULPA Filter (Top of Main Unit) FFU Replacement Date is 2013 Robot Support Plate is Present Robot - CNTRL Filter Replacement Date is 2013 Suck Back Box w/NT flow meter & manual reset Number of Load-ports is 2 std Load-port Size (Left) is 12 Load-port Size (Right) is 12 No Load-port Adapters (12->8) No Wafer ID Reader No RFID Reader Chemical Module 1 is SC1 Chemical Module 2 is HF 49% Chemical Module 3 is H2SO4 Chemical Delivery System (CDS) is CDS Buffer System for Chemical Cabinet No Bulk Chem Delivery system (BCD)_Active No Bulk Chem Delivery system (BCD)_Passive All Cables are present There are missing or damaged partsOEMモデルの説明
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.ドキュメント
ドキュメントなし