説明
説明なし構成
the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!). Inline heater for media and DI Main unit: 12-inch system with handler/gripper with flip option; Pinchuck Intermediate tanks with Trebor pumps Levitronix flow meters for heater flow sometimes cause problems FFU was converted to a different controller/fan (see photos) Chemistry cabinets: Cabinet 1: Main tank (40L) with buffer tank and buffer function Cabinet 2: Main tank (40L) with buffer tank and buffer function Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function The chemistry computer motherboard was replaced with a different one A weld on the drain in Chemistry Cabinet 3 was repairedOEMモデルの説明
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.ドキュメント
カテゴリ
Wet Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
125813
ウェーハサイズ：
6"/150mm, 12"/300mm
ヴィンテージ：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP304
カテゴリ
Wet Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
125813
ウェーハサイズ：
6"/150mm, 12"/300mm
ヴィンテージ：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available